I-Soft Lithography

I-SOFT LITHOGRAPHY igama elisetshenziselwa inani lezinqubo zokudlulisa iphethini. Isikhunta esiyinhloko siyadingeka kuzo zonke izimo futhi senziwe nge-microfabricated kusetshenziswa izindlela ezijwayelekile ze-lithography. Sisebenzisa isikhunta esiyinhloko, sikhiqiza iphethini / isitembu se-elastomeric esizosetshenziswa ku-lithography ethambile. Ama-Elastomer asetshenziselwa le njongo adinga ukuba angangeni ngamakhemikhali, abe nokusimama okuhle kokushisa, amandla, ukuqina, izakhiwo ezingaphezulu futhi abe ne-hygroscopic. Irabha ye-Silicone kanye ne-PDMS (i-Polydimethylsiloxane) yizinto ezimbili ezisetshenziswayo ezinhle. Lezi zitembu zingasetshenziswa izikhathi eziningi ku-lithography ethambile.

 

 

 

Okukodwa okuhlukile kwe-soft lithography is MICROCONTACT PRINTING. Isitembu se-elastomer simbozwa ngoyinki bese sicindezelwa endaweni engaphezulu. Iziqongo zephethini zithintana nendawo engaphezulu bese kudluliselwa ungqimba oluncane lwe-monolayer engu-1 kayinki. Le filimu ezacile i-monolayer isebenza njengemaski yokukhetha okumanzi.

 

 

 

Ukwehluka kwesibili ngu MICROTRANSFER MOLDING, lapho ingaphakathi lesikhunta se-elastomer sigcwaliswa ngesandulela se-polymer esiwuketshezi futhi siphushelwe endaweni. Lapho i-polymer iphulukisa ngemva kokubunjwa kwe-microtransfer, sisusa isikhunta, sishiya iphethini oyifunayo.

 

 

 

Okokugcina umehluko wesithathu uthi MICROMOLDING IN CAPILLARIES, lapho iphethini yesitembu se-elastomer iqukethe amashaneli asebenzisa amandla e-capillary ukuze afake i-polymer ewuketshezi esitembuni ukusuka ohlangothini lwaso. Ngokuyisisekelo, inani elincane le-polymer ewuketshezi libekwe eduze kweziteshi ze-capillary futhi amandla e-capillary adonsa uketshezi eziteshini. I-polymer ewuketshezi eyeqile iyasuswa futhi i-polymer ngaphakathi kwamashaneli ivunyelwe ukwelapha. Isikhunta sesitembu siyahlutshiwe futhi umkhiqizo usulungile. Uma ukubukeka kwesiteshi kumaphakathi futhi ubukhulu besiteshi buvunyelwe buncike oketshezini olusetshenzisiwe, ukuphindaphinda kwephethini enhle kungaqinisekiswa. Uketshezi olusetshenziswa ku-micromolding kuma-capillaries kungaba ama-polymers e-thermosetting, i-ceramic sol-gel noma ukumiswa kwezinto eziqinile ngaphakathi kwezincibilikisi eziwuketshezi. I-micromolding in the capillaries technique isetshenziswe ekukhiqizeni izinzwa.

 

 

 

I-Soft lithography isetshenziselwa ukwakha izici ezikalwa ku-micrometer kuya esikalini se-nanometer. I-Soft lithography inezinzuzo kunezinye izinhlobo ze-lithography njenge-photolithography kanye ne-electron beam lithography. Izinzuzo zihlanganisa lokhu okulandelayo:

 

• Izindleko eziphansi zokukhiqiza ngobuningi kune-photolithography yendabuko

 

• Ukufaneleka kwezicelo ku-biotechnology kanye nogesi wepulasitiki

 

• Ukufaneleka kwezinhlelo zokusebenza ezifaka indawo enkulu noma engahleliwe (nonflat).

 

• I-Soft Lithography inikeza izindlela eziningi zokudlulisa iphethini kunezindlela zendabuko ze-lithography (okunye okukhethwa kukho kokuthi ''yinki'')

 

• I-Soft Lithography ayidingi indawo esebenza isithombe ukuze udale ama-nanostructures

 

• Nge-lithography ethambile singafinyelela imininingwane emincane kune-photolithography kuzilungiselelo zaselabhorethri (~30 nm vs ~100 nm). Ukulungiswa kuncike kumaski esetshenzisiwe futhi kungafinyelela amanani afinyelele ku-6 nm.

 

 

 

I-MULTILAYER SOFT LITHOGRAPHY iyinqubo yokwenziwa lapho amagumbi amancane, amashaneli, ama-valve kanye nama-vias kubunjwa ngaphakathi kwezingqimba eziboshiwe zama-elastomer. Kusetshenziswa amadivaysi e-multilayer soft lithography ahlanganisa izendlalelo eziningi angenziwa ngezinto ezithambile. Ukuthamba kwalezi zinto kuvumela izindawo zedivayisi ukuthi zehliswe ngama-oda angaphezu kwamabili obukhulu uma kuqhathaniswa namadivayisi asekelwe ku-silicon. Ezinye izinzuzo ze-lithography ethambile, njenge-prototyping esheshayo, ukwenziwa lula kokwenziwa, nokuvumelana kwezinto eziphilayo, nazo zivumelekile ku-multilayer soft lithography. Sisebenzisa le ndlela ukuze sakhe amasistimu e-microfluidic asebenzayo anama-valve avuliwe, ama-switching valve, namaphampu aphume ngokuphelele kuma-elastomer.